Precise determination of metal effective work function and fixed oxide charge in MOS capacitors with high-κ dielectric - Concepedia

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Precise determination of metal effective work function and fixed oxide charge in MOS capacitors with high-κ dielectric

27

Citations

13

References

2006

Year

M. Ťapajna, K. Hušeková, J.P. Espinós, L. Harmatha, K. Fröhlich

Materials Science in Semiconductor Processing

Materials ScienceElectrical EngineeringEngineeringApplied PhysicsHigh-κ DielectricMicroelectronicsMos CapacitorsOxide Charge

References

	Year	Citations

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