Concepedia

Publication | Closed Access

Characterization of ion implanted TiN films

DOI

13

Citations

9

References

1997

Year

Kazuhiko Oda, Atsuyoshi Nakayama, Hisanori Ohara, N. Kitagawa, T. Nomura
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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