Publication | Closed Access
Characterization of epitaxial semiconductor growth by reflectance anisotropy spectroscopy and ellipsometry
122
Citations
89
References
1997
Year
Materials ScienceEngineeringReflectance Anisotropy SpectroscopyOptical PropertiesApplied PhysicsSemiconductor MaterialMolecular Beam EpitaxyEpitaxial GrowthCompound SemiconductorEpitaxial Semiconductor Growth
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