TEM and ellipsometry studies of nanolaminate oxide films prepared using atomic layer deposition - Concepedia

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TEM and ellipsometry studies of nanolaminate oxide films prepared using atomic layer deposition

45

Citations

17

References

2004

Year

David R. G. Mitchell, Darren Attard, Kim S. Finnie, Gerry Triani, Christophe J. Barbé, Christophe Depagne, John R. Bartlett

Applied Surface Science

Materials ScienceEngineeringNanomaterialsNanotechnologyOxide ElectronicsSurface ScienceApplied PhysicsEllipsometry StudiesChemical DepositionChemical Vapor DepositionAtomic Layer DepositionNanolaminate Oxide FilmsThin Film Processing

References

	Year	Citations

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