Concepedia

Picosecond YAG laser photoablation of amorphous silicon

W. Marine, J.M. Scotto d'Aniello, J. Marfaing

Applied Surface Science · 1990 · 14 citations · 8 references

DOI

Concepts

References

8

Semiconductor cluster beams: One and two color ionization studies of Si<i>x</i> and Ge<i>x</i>

J. R. Heath, Yuan Liu, Sean C. O’Brien et al. · The Journal of Chemical Physics · 1985 · 224 citations

, , +14

Generation of high-energy atomic beams in laser-superconducting target interactions

Jim P. Zheng, Zhi-Quan Huang, D. T. Shaw et al. · Applied Physics Letters · 1989 · 168 citations

, , +16

Laser-induced fluorescence studies of excimer laser ablation of Al2O3

R. W. Dreyfus, Roger Kelly, R. E. Walkup · Applied Physics Letters · 1986 · 164 citations

, , +17

Laser-induced plasmas for primary ion deposition of epitaxial Ge and Si films

D. Lubben, Scott A. Barnett, Kazuhiro Suzuki et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 127 citations

, , +14

Plasma emission from laser ablation of the high-temperature superconductor YBa2Cu3O7

Wayne A. Weimer · Applied Physics Letters · 1988 · 100 citations

, , +17