First reconfigurable MEMS separation columns for micro gas chromatography

Abstract

We present herein for the first time reconfigurable chromatographic separation columns by merging MEMS and nanotechnology using self-assembly of thiol compounds on an electrodeposited gold surface in MEMS columns. This coupling provides: (1) the ability to fabricate both polar and non-polar stationary phases, affording the separation of gas mixtures with a wide range of boiling points and polarities; and (2) the ability to reconfigure the separation characteristics by removing the stationary phase and functionalizing it with another thiol. MEMS columns were produced to provide 250μm-deep, 30μm-wide, 25cm-long, 16-channel mutlicapillary columns (μMCC) using a double-doped silicon-on-glass fabrication process. Multi-compound separations were achieved with separation efficiencies of 7200 plates/m. The method enables realization of highly reproducible, easy-to-coat, and reusable μGC separation columns, thus saving resources, time, and cost.