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Highly-sensitive silicon-on-insulator sensor based on two cascaded micro-ring resonators with vernier effect

EngineeringMicrofabricationMicro-ring ResonatorsHighly-sensitive Silicon-on-insulator SensorNano Electro Mechanical SystemSensor DesignMicro-optical ComponentVernier EffectMicroelectronicsPlanar Waveguide SensorMicrofluidics