Sulfur‐Doped Indium Oxide Thin Films as a New Transparent and Conductive Layer Prepared by OMCVD Process Using Butylindium Thiolate

Abstract

Thus we attempted to prepare In 2 O 3 films via vapor phase decomposition of Bu 2 InSPr i and it was found that the thiolate gave highly conductive and transparent In 2 O 3 films under slightly oxygenated carrier gas systems