Optical intensity modulation in a vertically stacked coupler incorporating electro-optic polymer

Abstract

A vertically stacked directional coupler incorporating electro-optic poled polymer was fabricated by spin coating, photolithography, and reactive ion etching processes, based on the fabrication technique used for polymeric single-mode channel waveguides. Vertically coupled operation at 1.3 μm have been achieved between two stacked channels which were kept 3.5–5 μm apart by a narrow cladding layer. The intensity modulation has been clearly demonstrated in the coupler with electrodes when a voltage is applied at 10 kHz between them.