Applied Physics Letters · 1995 · 37 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsCeramicsThin FilmsAmorphous MaterialsAmorphous SolidsCrystalline MaterialsFerroelectric CeramicsGlass MaterialsPerovskite MaterialsAmorphous Thin FilmsCrystallizationExcimer LasersLead Zirconate Titanate CeramicsPerovskite Crystal StructurePower Density
Amorphous PZT thin films 600 nm thick were rf sputtered from a PbZr0.44Ti0.56O3 ceramic target with excess PbO onto glass substrates maintained at room temperature. After irradiation with a 248 nm KrF pulsed excimer laser with a power density of 2.3×107 W/m2 at a frequency of 50 Hz and a pulsed width of 30 ns for 2 min, the films crystallized into the PZT perovskite structure to a depth of about 120 nm. Comparisons of this work with PZT crystallization obtained from a traditional oven and 488 nm Ar+ laser postdeposition treatments are also given.