Microwave-assisted volatilization of silicon fluorides for the determination of trace impurities in high purity silicon powder and quartz by ICP-MS

Ruey-Lin Ueng, Shiuh‐Jen Jiang, Chia-Ching Wan, A.C. Sahayam

Analytica Chimica Acta · 2005 · 11 citations · 12 references

Concepts

References

12