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Static bifurcation and primary resonance analysis of a MEMS resonator actuated by two symmetrical electrodes

Static BifurcationElectrical EngineeringEngineeringMicrofabricationMechanical SystemsMems ResonatorNano Electro Mechanical SystemPrimary Resonance AnalysisMicroactuatorNonlinear ResonanceMicro-electromechanical System