Electron Energy Distribution in Multicusp-Type ECR Plasma

Abstract

A multicusp-type electron cyclotron resonance (ECR) plasma device is built with SmCo magnets and 2.45 GHz, TE 11 circular-mode microwaves. DC bias can be superimposed between anode bars and a grid placed near the end surface to control the plasma. Electron energy distribution is measured by a Langmuir probe and a gridded analyzer. The plasma density is about 2×10 10 cm -3 and 4×10 10 cm -3 at the center and the cusp region, respectively. The equivalent electron temperature, 2/3 times the mean energy, is 4 eV and 15 eV at respective regions. The high-energy tail extends to above 100eV.