Simulation of Energy Distribution for Scanning X-ray Probe

Abstract

The energy distribution of a scanning x-ray probe which is equipped with an elliptical mirror monochromator has been simulated with optical ray tracing, a numerically described energy distribution of Al Kα x-ray and a rocking curve. The rocking curve was estimated by dynamic diffraction theory with structure factors for quartz. The peak energy of the diffracted x-ray beam did not change with beam size, although the shapes of energy distribution were found to change slightly. Using the simulated x-ray energy distribution and the apparatus function, the energy width of the Fermi edge was simulated, which is to be compared with that obtained experimentally by monochromatic Al Kα x-ray excitation. The widths of the silver Fermi edge spectra were measured with different x-ray beam sizes. In addition, the relation between the x-ray beam position on the anode and the diffracted x-ray energy distribution was investigated. The peak energy of the diffracted x-ray beam was found to move with the x-ray beam position. It is shown that this kind of simulation can be effectively used for estimating the energy distribution and the intensity distribution of the diffracted x-ray beam. © 1997 by John Wiley & Sons, Ltd.