Publication | Closed Access
Impact of line edge roughness on the resistivity of nanometer-scale interconnects
49
Citations
3
References
2004
Year
Electrical EngineeringWafer Scale ProcessingEngineeringElectromigration TechniqueSpecific ResistanceNanoelectronicsSurface ScienceApplied PhysicsNanometer-scale InterconnectsElectronic PackagingLine Edge Roughness
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