Structure and properties of oblique-deposited magnetic thin films

Abstract

Structural characterizations of angle-of-incidence CoNi films using electron microscopy are reported. Both fixed-angle-of-incidence and continuous-variation-of-incidence films are included. The tangent rule is found to be valid at high oblique angle. The easy axis as measured from the torque curve and angular variation of coercivity in a 170-nm film deposited at 75° is about 15° inclined to the film plane, whereas the columnar axis is about 30°. A weak c-axis texture exists as revealed by the electron diffraction study. The c-axis texture in the continuous-variation-of-incidence films with and without oxygen is not detected by electron diffraction.