Concepedia

Silicon nitride chemical vapor deposition from dichlorosilane and ammonia: theoretical study of surface structures and reaction mechanism

A. A. Bagatur’yants, Andrei A. Safonov, J. Vernon Cole, M. W. Stoker, Anatoli Korkin

Surface Science · 2001 · 35 citations · 36 references

DOI

Concepts

References

36

General atomic and molecular electronic structure system

Michael W. Schmidt, Kim K. Baldridge, Jerry A. Boatz et al. · Journal of Computational Chemistry · 1993 · 20.2K citations

, , +17

Ceramics based on the Si-Al-O-N and Related Systems

K. H. Jack, W.I. Wilson · Nature Physical Science · 1972 · 401 citations

, , +10

Atom-resolved surface chemistry using scanning tunneling microscopy

Robert A. Wolkow, Phaedon Avouris · Physical Review Letters · 1988 · 361 citations

, , +17

Atom-resolved surface chemistry studied by scanning tunneling microscopy and spectroscopy

Phaedon Avouris, Robert A. Wolkow · Physical review. B, Condensed matter · 1989 · 286 citations

, , +17

The crystal structure of β-Si3N4: structural and stability considerations between α- and β-Si3N4

Reinar Grün · Acta Crystallographica Section B · 1979 · 269 citations

, , +14