Silicon nitride chemical vapor deposition from dichlorosilane and ammonia: theoretical study of surface structures and reaction mechanism - Concepedia

Concepedia

Publication | Closed Access

Silicon nitride chemical vapor deposition from dichlorosilane and ammonia: theoretical study of surface structures and reaction mechanism

34

Citations

36

References

2001

Year

A. A. Bagatur’yants, Andrei A. Safonov, J. Vernon Cole, M. W. Stoker, Anatoli Korkin

Surface Science

Chemical EngineeringTheoretical StudyEngineeringReaction MechanismSurface ScienceSiliceneSemiconductor Device FabricationChemistryChemical DepositionSilicon On InsulatorChemical Vapor Deposition

References

	Year	Citations

Page 1