Concepedia
Surface and Coatings Technology · 1998 · 44 citations · 2 references
EngineeringMaterials EngineeringMaterials ScienceSemiconductor DevicesChemical Vapor Deposition
2
Titanium aluminum nitride films: A new alternative to TiN coatings
Wolf‐Dieter Münz · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 947 citations
Natural Sciences, Materials Engineering, Materials Science +17
On structure and properties of sputtered Ti and Al based hard compound films
O. Knotek, M. Böhmer, T. Leyendecker · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 397 citations