Preparation of Al–Pd–Mn Quasicrystal Films by Laser Ablation Method

Abstract

Al–Pd–Mn quasicrystal thin films were prepared by KrF excimer laser ablation for the first time, to our knowledge. The thin films were obtained only when the substrate temperature was lowered to liquid nitrogen temperatures during ablation. The composition of the films was found to agree with that of the target material within a few percent, regardless of the substrate temperature in the rang from -196°C to 300°C.