Publication | Closed Access
Silicon glass anodic bonding under partial vacuum conditions: problems and solutions
16
Citations
7
References
2002
Year
Materials EngineeringMaterials ScienceGlass-ceramicEngineeringPhysicsMicrofabricationSilicon Glass AnodicGlass TransitionSurface ScienceApplied PhysicsGlass-forming LiquidGlass MaterialPartial Vacuum Conditions
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