Publication | Closed Access
Silicon-rich oxynitride hosts for 1.5μm Er3+ emission fabricated by reactive and standard RF magnetron sputtering
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Citations
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References
2011
Year
EngineeringPhysicsSilicon-rich Oxynitride HostsNanoelectronicsOxide ElectronicsApplied PhysicsStandard Rf MagnetronGallium OxideSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsOptoelectronicsEr3+ Emission
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