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The precision of the femtosecond-pulse laser ablation of TiN films on silicon
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1999
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Materials SciencePhotonicsTin FilmsAdvanced Laser ProcessingEngineeringPhysicsOptical PropertiesApplied PhysicsLaser ApplicationsLaser AblationLaser Processing TechnologyLaser-assisted DepositionPulsed Laser DepositionLaser-surface InteractionsUltrafast LasersFemtosecond-pulse Laser Ablation
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