Publication | Closed Access
Low-temperature heteroepitaxial growth of cubic SiC on Si using hydrocarbon radicals by gas source molecular beam epitaxy
19
Citations
6
References
1995
Year
Materials ScienceMaterials EngineeringEngineeringApplied PhysicsCubic SicHydrocarbon RadicalsSemiconductor Device FabricationMolecular Beam EpitaxyLow-temperature Heteroepitaxial GrowthSilicon On InsulatorCarbide
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