Nano Letters · 2008 · 47 citations · 0 references
EngineeringElectrical EngineeringMaterials ScienceMicrofabricationNanotechnologySemiconductor DevicesCarbon NanotubesIntegrated Circuit FabricationNanoelectronicsNanostructured Electronic MaterialsNanotubesPolymer Thin FilmsCarbon Nanotube ChiralityCarbon Nanotube ElectronicsCarbon Nanotube Field-effect TransistorsDigital Logic CircuitsNanotube ChiralityPatterned SurfacesPolymethyl MethacrylateSingle-walled Carbon Nanotubes
We present a general selective positioning and integration technique for fabricating single-walled carbon nanotube (SWNT) circuits with preselected individual SWNTs as building blocks by utilizing poly(methyl methacrylate) (PMMA) thin film as a macroscopically handlable mediator. The transparency and marker-replicating capability of PMMA mediator allow the selective placement of chirality-specific nanotubes onto predesigned patterned surfaces with a resolution of ca. 1 mum. This technique is compatible with multiple operations and p-n conversion by chemical doping, which enables the construction of complex and logic circuits. As demonstrations of building SWNTs circuits, we fabricated a field effect inverter, a 2 x 2 all-SWNT crossbar field effect transistor (FET), and flexible FETs on plastic with this technique. This selective positioning approach can also be extended to construct purpose-directed architecture with various nanoscale building blocks.