Phase Separation in an SiCO Glass Studied by Transmission Electron Microscopy and Electron Energy‐Loss Spectroscopy

Abstract

SiCO glasses prepared from sol–gel precursors via pyrolysis in argon at temperatures ranging from 1000° to 1400°C were studied by transmission electron microscopy (TEM), in conjunction with electron energy‐loss spectroscopy (EELS). EELS analysis showed that stoichiometric SiCO glass underwent phase separation, forming SiO 2 ‐ and SiC‐based environments. This process started at ∼1200°C. However, at temperatures >1300°C, precipitation of nanometer‐sized SiC particles embedded in vitreous SiO 2 was monitored by high‐resolution TEM.