Deposition rate characteristics for steady state high power impulse magnetron sputtering (HIPIMS) discharges generated with a modulated pulsed power (MPP) generator - Concepedia

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Deposition rate characteristics for steady state high power impulse magnetron sputtering (HIPIMS) discharges generated with a modulated pulsed power (MPP) generator

54

Citations

20

References

2011

Year

F. Papa, Holger Gerdes, Ralf Bandorf, Arutiun P. Ehiasarian, G. Braeuer, R. Tietema, T. Krug

Thin Solid Films

Electrical EngineeringEngineeringPulsed PowerGlow DischargePulse PowerGas Discharge PlasmaDeposition Rate Characteristics

References

	Year	Citations

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