Characteristics of rare-earth element erbium implanted in silicon

Y. S. Tang, KC Heasman, W. P. Gillin, B.J. Sealy

Applied Physics Letters · 1989 · 97 citations · 5 references

Concepts

Abstract

Rare-earth element erbium implanted into silicon was studied by photoluminescence and Rutherford backscattering analysis. Two sets of luminescent bands related to the weakly crystal field split spin-orbit levels 4I13/2→4I15/2 of Er 3+ (4f 11) at different lattice sites having different symmetries were observed.

References

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