Structure and mechanical properties of PACVD fluorinated amorphous carbon films - Concepedia

Concepedia

Publication | Closed Access

Structure and mechanical properties of PACVD fluorinated amorphous carbon films

50

Citations

29

References

2003

Year

C. E. Bottani, Alessio Lamperti, Luca Nobili, P.M. Ossi

Thin Solid Films

Materials ScienceMaterials EngineeringEngineeringCarbon-based MaterialMechanical PropertiesNanomaterialsApplied PhysicsAmorphous SolidCarbon-based FilmsThin Film Processing

References

	Year	Citations

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