Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 68 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceSurface ChemistrySurface EngineeringSurface ScienceIon ImplantationPlasma Surface TreatmentSurface ModificationSurface PhysicsSurface PreparationSurface TreatmentIon Beam IrradiationIon Beam Surface TreatmentIon-surface InteractionsSputteringSurface DamageSurface Modification By Ion ImplantationSurface SmoothingSurface Sputtering
Gas cluster ion beam techniques have been developed for atomic and molecular level surface modification processing. Shallow implantation, high yield sputtering, surface smoothing, and low damage surface cleaning have been demonstrated experimentally. This article reports recent results concerning surface treatments that are distinctly different from those produced by conventional monomer ion irradiation. Possible applications of gas cluster ion beam processing to new areas of surface modifications are suggested.