An on-chip micro-friction tester for tribology research of silicon based MEMS devices - Concepedia

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An on-chip micro-friction tester for tribology research of silicon based MEMS devices

12

Citations

9

References

2007

Year

Zhanshe Guo, Yonggang Meng, Caijun Su, Hao Wu

Microsystem Technologies

Mems DevicesEngineeringTribology ResearchMicrofabricationMechanical EngineeringInstrumentationElectronic PackagingMicroelectronicsOn-chip Micro-friction TesterFriction ControlMicro-electromechanical SystemSilicon Debugging

References

	Year	Citations

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