Publication | Closed Access
Synchrotron X-ray reflectivity study of high dielectric constant alumina thin films prepared by atomic layer deposition
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Citations
12
References
2006
Year
Materials ScienceAluminium NitrideEngineeringSurface ScienceApplied PhysicsThin FilmsChemical DepositionAtomic Layer DepositionThin Film ProcessingDepth-graded Multilayer Coating
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