Publication | Closed Access
Structures and Physical Properties of Films Deposited by Simultaneous DC Sputtering of ZnO and In2O3 or ITO Targets
68
Citations
22
References
2000
Year
Materials EngineeringMaterials ScienceEngineeringNanotechnologyOxide ElectronicsSurface ScienceApplied PhysicsThin FilmsChemical Vapor DepositionSimultaneous Dc SputteringIto TargetsThin Film ProcessingPhysical Properties
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