Condition optimization, reliability evaluation of SiO2–SiO2 HF bonding and its application for UV detection micro flow cell - Concepedia

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Condition optimization, reliability evaluation of SiO2–SiO2 HF bonding and its application for UV detection micro flow cell

39

Citations

3

References

2000

Year

Hiroyuki Nakanishi, T. Nishimoto, Masaki Kanai, Toshikazu Saitoh, Ryuta Nakamura, T. Yoshida, Sunao Shoji

Sensors and Actuators A Physical

Materials ScienceCondition OptimizationChemical EngineeringEngineeringMicrofabricationReliability EvaluationSio2–sio2 Hf BondingBiomedical EngineeringSilicon On InsulatorMicroelectronics

References

	Year	Citations

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