Macroporous silicon hydrogen diffusion layers for micro‐fuel cells

Abstract

Abstract In this study, we have demonstrated the possibility of using macroporous silicon as a hydrogen diffusion layer in integrated micro fuel cells. Macroporous silicon was used to increase an exchange surface between hydrogen and active layers of micro fuel cells. Moreover, electrochemical etching is an interesting alternative to costly Deep Reactive Ion Etching techniques. A maximum density power of 250 mW/cm 2 was demonstrated using conventional proton exchange membrane micro fuel cell. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)