Concepedia

Publication | Closed Access

Small angle X-ray scattering measurements of porous low-k films using synchrotron radiation

DOI

11

Citations

11

References

2006

Year

Takashi Suzuki, Kazuhiko Omote, Yoshiyasu Ito, Ichiro Hirosawa, Yoshihiro Nakata, I. Sugiura, Noriyoshi Shimizu, T. Nakamura
Thin Solid Films

References

YearCitations

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