Mechanical properties of amorphous and microcrystalline silicon films - Concepedia

Concepedia

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Mechanical properties of amorphous and microcrystalline silicon films

45

Citations

24

References

2007

Year

V. Kulikovsky, V. Vorlı́ček, P. Boháč, Martin Stranyánek, Radim Čtvrtlík, A. V. Kurdyumov

Thin Solid Films

Materials ScienceEngineeringSilicon On InsulatorApplied PhysicsThin FilmsAmorphous SolidMicrocrystalline Silicon FilmsThin Film ProcessingMicrostructureAmorphous Materials

References

	Year	Citations

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