Towards foundry approach for silicon photonics: silicon photonics platform ePIXfab

Pieter Dumon, Wim Bogaerts, R. Baets, J-M. Fédéli, Laurent Fulbert

Electronics Letters · 2009 · 83 citations · 16 references

Concepts

Abstract

Fabless access to wafer-scale silicon photonics technology is moving silicon photonics closer to becoming a mainstream technology and opens up new exciting areas for research at the same time. It is only by using wafer-scale technology that this emerging field will be able to realise its promise: to become a disruptive technology. At the basis of the rationale for silicon photonics is a complex of photonic functions integrated on a single chip, coupled to a stable, high-yield volume fabrication technology base. ePIXfab is a service platform offering R&D oriented access to state-of-the-art 200 mm wafer-scale CMOS technology optimised for silicon photonics purposes.

References

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