The evaporation of metals and elemental semiconductors using a work-accelerated electron beam source

Vacuum Deposition of Thin Films

L. Holland, Joseph Greenspan · Journal of The Electrochemical Society · 1957 · 861 citations

Natural Sciences, Materials Engineering, Materials Science +11

Electrical conduction in amorphous silicon and germanium

P.A. Walley · Thin Solid Films · 1968 · 133 citations

Natural Sciences, Materials Science, Physics +14

Epitaxial Growth of Silicon by Vacuum Evaporation

B. A. Unvala · Nature · 1962 · 41 citations

Engineering, Materials Engineering, Materials Science +13

Techniques for Evaporation of Metals

Leonard O. Olsen, Charles S. Smith, E. C. Crittenden · Journal of Applied Physics · 1945 · 33 citations

Engineering, Materials Engineering, Materials Science +13

Thin film microelectronics

J. R. BALMER · Vacuum · 1966 · 12 citations