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Etching process optimization using NH4Cl aqueous solution to texture ZnO:Al films for efficient light trapping in flexible thin film solar cells

Materials ScienceEngineeringOxide ElectronicsNh4cl Aqueous SolutionApplied PhysicsAl FilmsThin FilmsProcess OptimizationPlasma EtchingPhotovoltaicsNanolithography MethodThin Film ProcessingSolar Cell Materials