Concepedia

Publication | Closed Access

Extreme UV diffraction grating fabricated by nanoimprint lithography

DOI

15

Citations

10

References

2012

Year

Chun-Hung Lin, Yi-Ming Lin, Chia‐Ching Liang, Yin‐Yu Lee, Hok‐Sum Fung, Bor‐Yuan Shew, Szu-Hung Chen
Microelectronic Engineering

References

YearCitations

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