Thin Solid Films · 2010 · 89 citations · 39 references
EngineeringMaterials EngineeringMaterials ScienceOptical MaterialsPhotonicsPlasma PhysicsLaser Material ProcessingLaser PhysicsLaser-plasma InteractionsSilicon MaterialsSilicon PhotonicsUltrafast OpticsFemtosecond Laser PulsesLaser AblationMaterial AblationUltrafast Laser Material ProcessingUltrafast Laser Micromachining
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Microstructuring of silicon with femtosecond laser pulses
Tsing-Hua Her, Richard Finlay, Claudia Wu et al. · Applied Physics Letters · 1998 · 807 citations
Femtosecond laser ablation of silicon–modification thresholds and morphology
Jörn Bonse, S. Baudach, Jörg Krüger et al. · Applied Physics A · 2002 · 807 citations