Publication | Closed Access
Photoacoustic microscopy of an integrated circuit
41
Citations
6
References
1980
Year
EngineeringMicroscopySubsurface PropertiesQuadrature ComponentsMicroscopy MethodOptical PropertiesPhotoacoustic ImagingComputational ImagingDance ImagesOptical SystemsLight MicroscopyBiophysicsPhotoacoustic SignalSpectroscopyBiomedical ImagingPhotoacoustic MicroscopyOptical Information ProcessingMedicineAcoustic Microscopy
The in-phase and quadrature components of a photoacoustic signal have been used to form images of an integrated circuit with ∼6 μm resolution. These photoacoustic images contain information about subsurface properties of the sample.
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