Surface and Coatings Technology · 2002 · 89 citations · 6 references
Natural SciencesMaterials SciencePhysicsSurface EngineeringSurface ScienceThin FilmsChemical Vapor DepositionPlasma Surface TreatmentThin Film Electrical PropertiesThin Film Surface MorphologyThin-film DepositionFilm DepositionGlow DischargesPlasma DepositionPlasma-enhanced DepositionThin Film Deposition Materials
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