Publication | Closed Access
Study of an atmospheric pressure glow discharge (APG) for thin film deposition
89
Citations
6
References
2002
Year
Materials ScienceElectrical EngineeringEngineeringGlow DischargeSurface ScienceApplied PhysicsChemical Vapor DepositionThin FilmsChemical DepositionGas Discharge PlasmaPlasma ProcessingThin Film DepositionElectrical Insulation
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