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An original approach for the fabrication of Si/SiO2 multilayers using reactive magnetron sputtering

Materials ScienceMaterials EngineeringEngineeringMicrofabricationNanoelectronicsSurface ScienceApplied PhysicsOriginal ApproachSemiconductor Device FabricationSi/sio2 MultilayersSilicon On InsulatorMicroelectronicsChemical Vapor DepositionThin Film ProcessingReactive Magnetron Sputtering