A multilayer model for describing hardness variations of aged porous silicon low-dielectric-constant thin films

K. Rahmoun, Alain Iost, Vincent Kéryvin, Gildas Guillemot, Nasr Eddine Chabane Sari

Thin Solid Films · 2009 · 51 citations · 50 references

DOIFull text

Open access

Concepts

References

50