Thin Solid Films · 2009 · 51 citations · 50 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationMechanical Behavior Of MaterialsThin FilmsDielectricsPorous MaterialsSemiconductor Thin FilmsSilicon MaterialsThin Film Mechanical PropertiesThin-film MaterialsAging MechanismsAging Of Thin FilmsHardnessLow-dielectric-constant MaterialsPorous SiliconSilicon Thin FilmsThin Film Aging
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