Concepedia

Publication | Closed Access

Metal oxide/silicon oxide multilayer with smooth interfaces produced by in situ controlled plasma-enhanced MOCVD

DOI

19

Citations

12

References

2000

Year

Frank Hamelmann, G. Haindl, J. Schmalhorst, A. Aschentrup, E. Majková, U. Kleineberg, U. Heinzmann, Andreas Klipp, P. JUTZI, Aleksei Anopchenko,
Thin Solid Films

References

YearCitations

Page 1