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Analysis of native oxide films and oxide-substrate reactions on III–V semiconductors using thermochemical phase diagrams

SemiconductorsMaterials ScienceOxide HeterostructuresEngineeringIii–v SemiconductorsOxide ElectronicsOxide SemiconductorsApplied PhysicsSemiconductor MaterialThin FilmsNative Oxide FilmsCategoryiii-v SemiconductorThermochemical Phase Diagrams