Area-tunable micromirror based on electrowetting actuation of liquid-metal droplets

Abstract

The authors report a micromirror device actuated by electrowetting effect. The micromirror surface is formed by a liquid-metal droplet jetted on a substrate and then topped with a parylene/Teflon coated indium tin oxide glass slide. The droplet is deformed by a voltage applied across the parylene/Teflon film. The radius of micromirror is tuned from 13μm (0V) to 88μm (90V), and the normalized area increases from 0.2 to 0.94 accordingly. The switching time ranges from 1ms for a 350μm diameter droplet to 0.2ms for a 50μm one. A 4×1 micromirror array is demonstrated and switched simultaneously.