Young modulus and Poisson ratio of PZT thin film by Picosecond Ultrasonics

Abstract

Thin-film sol-gel Pb(Zr <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.52</sub> , Ti <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0.48</sub> )O <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> (PZT) can be used in many actuator applications thanks to its high piezoelectric coefficients. The accurate knowledge of its mechanical properties such as Young's modulus (E) and Poisson ratio (v) or stiffness matrix is a key point for predictive design, whereas the state of the art reports K <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">PZT</sub> ranging from 70 to 139GPa. Those parameters can be accurately characterized by Picosecond Ultrasonics (PU) as detailed in this paper.