Hydrogenated amorphous silicon films deposited by reactive sputtering: The electronic properties, hydrogen bonding and microstructure - Concepedia

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Hydrogenated amorphous silicon films deposited by reactive sputtering: The electronic properties, hydrogen bonding and microstructure

99

Citations

25

References

1989

Year

Mustafa Pinarbasi, N. Maley, Alan Myers, John R. Abelson

Thin Solid Films

Materials ScienceEngineeringSilicon On InsulatorSurface ScienceApplied PhysicsSemiconductor Device FabricationElectronic PropertiesThin FilmsReactive SputteringAmorphous SolidThin Film ProcessingAmorphous Silicon Films

References

	Year	Citations

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